A planar surface acoustic wave micropump for closed-loop microfluidics
نویسندگان
چکیده
منابع مشابه
Development of a Surface Acoustic Wave Planar Motor under Closed Loop Control
This paper describes the development of a Surface Acoustic Wave (SAW) planar motor under closed loop control, which can be applied as an ultra precision multi-axis manipulator. In papers presented so far on this topic, a SAW motor is driven in open loop. The slider is manipulated by inducing a repetitive small number of wave periods. In this way a slow slider motion can be generated, which howe...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2017
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.5007701